Misplaced Pages

19 January 2006

• curprev 09:4009:40, 19 January 2006 Guiding light talk contribs m 8,401 bytes −9 No edit summary undo
• curprev 05:2905:29, 19 January 2006 Guiding light talk contribs 8,410 bytes +71 upper limit on NA for current lens materials undo
• curprev 05:0605:06, 19 January 2006 Guiding light talk contribs m 8,339 bytes +8 NA upper limit for undoped water undo
• curprev 03:0203:02, 19 January 2006 Guiding light talk contribs 8,331 bytes +158 upper limit on numerical aperture undo

12 January 2006

• curprev 16:3316:33, 12 January 2006 Guiding light talk contribs 8,173 bytes +605 depth of focus examples undo
• curprev 08:2208:22, 12 January 2006 Guiding light talk contribs 7,568 bytes +73 link to nanoimprint lithography; tighter requirements drive up costs undo
• curprev 05:2505:25, 12 January 2006 Guiding light talk contribs m 7,495 bytes +1 typo spacing undo
• curprev 05:2405:24, 12 January 2006 Guiding light talk contribs 7,494 bytes +464 discussion of lithography tool costs undo

7 January 2006

• curprev 06:4806:48, 7 January 2006 Guiding light talk contribs 7,030 bytes +285 Last section edits undo
• curprev 04:1504:15, 7 January 2006 61.62.189.26 talk 6,745 bytes +210 Updated with link on orders undo

6 January 2006

• curprev 23:5623:56, 6 January 2006 Guiding light talk contribs m 6,535 bytes +12 tool orders have been placed; will cite later undo

5 January 2006

• curprev 06:2606:26, 5 January 2006 Guiding light talk contribs m 6,523 bytes −1 removed comma undo
• curprev 06:2606:26, 5 January 2006 Guiding light talk contribs 6,524 bytes +137 Removed cost figures (let market decide). undo
• curprev 05:5505:55, 5 January 2006 69.181.80.136 talk 6,387 bytes +414 →Remaining Concerns undo

4 January 2006

• curprev 02:3502:35, 4 January 2006 Guiding light talk contribs 5,973 bytes +282 Added more info on defects undo

3 January 2006

• curprev 05:1405:14, 3 January 2006 Guiding light talk contribs 5,691 bytes +176 Added known method of producing dense hole or island images undo
• curprev 05:0105:01, 3 January 2006 61.61.254.9 talk 5,515 bytes +167 Sections defined for better readability undo

1 January 2006

• curprev 03:2903:29, 1 January 2006 Cmprince talk contribs m 5,348 bytes −10 rm double spacing undo

20 December 2005

• curprev 06:2406:24, 20 December 2005 Guiding light talk contribs 5,358 bytes +277 Added 'lithography-friendly' layout;moved anti-reflection discussion earlier;clarified relevance of subwavelength photomask features to immersion lithiography undo

17 December 2005

• curprev 09:1409:14, 17 December 2005 Guiding light talk contribs 5,081 bytes +164 Added discussion on: imaging of holes and islands, and anti-reflection benefits undo

13 December 2005

• curprev 09:3909:39, 13 December 2005 61.61.254.9 talk 4,917 bytes +292 more discussion on numerical aperture upper limit undo

4 December 2005

• curprev 15:5015:50, 4 December 2005 218.168.171.20 talk 4,625 bytes +328 More discussion on immersion resolution enhancement criteria undo
• curprev 15:0015:00, 4 December 2005 Guiding light talk contribs 4,297 bytes +188 Added discussion on 157 nm immersion undo
• curprev 02:4802:48, 4 December 2005 Guiding light talk contribs 4,109 bytes +225 Added water doping undo
• curprev 00:5100:51, 4 December 2005 61.64.181.107 talk 3,884 bytes +326 Added consideration of shorter wavelengths undo

3 December 2005

• curprev 15:2315:23, 3 December 2005 Guiding light talk contribs 3,558 bytes +441 Described theoretical upper limit on numerical aperture a bit more undo

2 December 2005

• curprev 13:1913:19, 2 December 2005 61.64.235.245 talk 3,117 bytes +16 minor grammatical correction, replaced "variant" with "resolution enhancement" undo
• curprev 08:2708:27, 2 December 2005 Guiding light talk contribs m 3,101 bytes +6 Added extra spacings for better readability undo
• curprev 02:5302:53, 2 December 2005 61.61.254.9 talk 3,095 bytes +6 changed terminology "half-pitch" to "lines and spaces" undo
• curprev 02:5202:52, 2 December 2005 61.61.254.9 talk 3,089 bytes +367 Added high-index materials information undo

29 November 2005

• curprev 05:4405:44, 29 November 2005 Guiding light talk contribs m 2,722 bytes +2 No edit summary undo

28 November 2005

• curprev 23:0523:05, 28 November 2005 Cmprince talk contribs m 2,720 bytes −14 Style edits undo
• curprev 23:0223:02, 28 November 2005 Cmprince talk contribs 2,734 bytes −73 wikify and copyedit, create References section undo
• curprev 02:3702:37, 28 November 2005 Guiding light talk contribs m 2,807 bytes −1 change stub from photo to tech (different from photography) undo
• curprev 01:1001:10, 28 November 2005 Emersoni talk contribs m 2,808 bytes +6 stub sort undo
• curprev 00:3300:33, 28 November 2005 Guiding light talk contribs m 2,802 bytes +11 No edit summary undo

27 November 2005

• curprev 17:1717:17, 27 November 2005 Guiding light talk contribs m 2,791 bytes +75 No edit summary undo
• curprev 15:3715:37, 27 November 2005 Guiding light talk contribs m 2,716 bytes +33 No edit summary undo
• curprev 15:3115:31, 27 November 2005 Guiding light talk contribs 2,683 bytes +821 Added other considerations undo
• curprev 15:1115:11, 27 November 2005 Guiding light talk contribs 1,862 bytes +62 Added refractive index undo

26 November 2005

• curprev 15:4015:40, 26 November 2005 Guiding light talk contribs m 1,800 bytes −15 No edit summary undo
• curprev 15:3515:35, 26 November 2005 Guiding light talk contribs m 1,815 bytes +1 No edit summary undo
• curprev 14:3814:38, 26 November 2005 Guiding light talk contribs 1,814 bytes +27 No edit summary undo
• curprev 10:1710:17, 26 November 2005 Guiding light talk contribs m 1,787 bytes +4 No edit summary undo
• curprev 10:1610:16, 26 November 2005 Guiding light talk contribs m 1,783 bytes −14 No edit summary undo
• curprev 09:5909:59, 26 November 2005 Guiding light talk contribs 1,797 bytes +739 Added references and effects limiting numerical aperture undo
• curprev 06:2606:26, 26 November 2005 Guiding light talk contribs 1,058 bytes +426 ITRS update; technology enhancments discussed undo

18 June 2005

• curprev 19:3219:32, 18 June 2005 Cmprince talk contribs m 632 bytes +28 copy: immersion not just for 193nm, +stub undo

8 May 2004

• curprev 21:4221:42, 8 May 2004 Niteowlneils talk contribs m 604 bytes +31 fmt undo
• curprev 20:1920:19, 8 May 2004 D Thong talk contribs 573 bytes +573 No edit summary