Misplaced Pages

29 October 2024

• curprev 00:0400:04, 29 October 2024 98.43.223.22 talk 10,103 bytes +992 →Background: put two sentences from "History" section at the end of this "Background" section. If more cited statements can be made of it's history, feel free to put section back. undo
• curprev 00:0200:02, 29 October 2024 98.43.223.22 talk 9,111 bytes −1,112 →History: moved three sentences of "History" into "Background" undo Tag: section blanking
• curprev 00:0000:00, 29 October 2024 98.43.223.22 talk 10,223 bytes −26 →History: deleted unsource, undated statement about multiple patterning with: "Aggressive multiple patterning with DUV only may be applied to 5nm."<ref>Q. Wu et al., CSTIC 2023.</ref> undo

16 October 2024

• curprev 18:1718:17, 16 October 2024 Citation bot talk contribs 10,249 bytes +101 Altered template type. Add: chapter-url, chapter, title. Removed or converted URL. | Use this bot. Report bugs. | Suggested by Headbomb | #UCB_toolbar undo
• curprev 18:1618:16, 16 October 2024 Headbomb talk contribs 10,148 bytes −98 ce undo
• curprev 05:1005:10, 16 October 2024 Citation bot talk contribs 10,246 bytes +72 Add: bibcode, authors 1-1. editors 1-1. Removed parameters. Some additions/deletions were parameter name changes. | Use this bot. Report bugs. | Suggested by Headbomb | Linked from Misplaced Pages:WikiProject_Academic_Journals/Journals_cited_by_Wikipedia/Sandbox | #UCB_webform_linked 159/425 undo

19 August 2024

• curprev 17:2117:21, 19 August 2024 DMH223344 talk contribs 10,174 bytes +202 →Multiple patterning: add citation undo Tags: nowiki added Visual edit Newcomer task Newcomer task: references

14 June 2024

• curprev 15:0315:03, 14 June 2024 Seinfeld rocks talk contribs m 9,972 bytes −25 removed citation needed note undo Tag: Visual edit
• curprev 15:0315:03, 14 June 2024 Seinfeld rocks talk contribs m 9,997 bytes +515 Added journal reference citation for the refractive index of water as described. undo Tag: Visual edit

5 April 2024

• curprev 16:3416:34, 5 April 2024 Citation bot talk contribs 9,482 bytes +29 Added bibcode. | Use this bot. Report bugs. | Suggested by Whoop whoop pull up | #UCB_webform 821/3364 undo

29 December 2023

• curprev 22:0422:04, 29 December 2023 ComputerUserUser talk contribs 9,453 bytes +694 No edit summary undo Tag: 2017 wikitext editor

17 September 2023

• curprev 20:4420:44, 17 September 2023 50.100.188.198 talk 8,759 bytes −4 →History undo

12 April 2023

• curprev 08:3408:34, 12 April 2023 2001:14ba:1f3:c800:508c:2fd1:fcda:45bf talk 8,763 bytes −133 probably very much not true (anymore?) since I ended up here from https://en.wikipedia.org/GlobalFoundries undo

2 February 2023

• curprev 04:3704:37, 2 February 2023 203.181.243.17 talk 8,896 bytes 0 Corrected incorrect capitalization undo
• curprev 04:3704:37, 2 February 2023 203.181.243.17 talk 8,896 bytes +23 Corrected link from polarization (psychology) to polarization (physics) undo

19 January 2023

• curprev 16:5216:52, 19 January 2023 InternetArchiveBot talk contribs 8,873 bytes +208 Rescuing 1 sources and tagging 0 as dead.) #IABot (v2.0.9.3 undo

9 November 2022

• curprev 11:0511:05, 9 November 2022 AnomieBOT talk contribs m 8,665 bytes +114 Dating maintenance tags: {{Cn}} {{Unreferenced section}} {{When}} undo
• curprev 10:4410:44, 9 November 2022 Wuerzele talk contribs 8,551 bytes +20 when ? undo
• curprev 10:4210:42, 9 November 2022 Wuerzele talk contribs 8,531 bytes +1 →Throughput: pic to R undo
• curprev 10:4110:41, 9 November 2022 Wuerzele talk contribs 8,530 bytes +25 →Multiple patterning: {{unreferenced section}} undo
• curprev 10:4010:40, 9 November 2022 Wuerzele talk contribs 8,505 bytes +94 →Throughput: chronology undo Tag: ProveIt edit
• curprev 10:3710:37, 9 November 2022 Wuerzele talk contribs 8,411 bytes +414 Reference edited with ProveIt added dates undo Tag: ProveIt edit
• curprev 10:2410:24, 9 November 2022 Wuerzele talk contribs 7,997 bytes +13 {{when}} or replace by date undo

22 October 2022

• curprev 17:5817:58, 22 October 2022 Rkinch talk contribs 7,984 bytes +30 →See also: Add Water immersion objective undo
• curprev 17:5517:55, 22 October 2022 Rkinch talk contribs 7,954 bytes +34 →See also: Add Oil immersion undo

28 September 2022

• curprev 05:4305:43, 28 September 2022 Tedsanders talk contribs 7,920 bytes +189 Found an earlier source for immersion lithography in 1984. undo Tag: Visual edit
• curprev 05:2505:25, 28 September 2022 Tedsanders talk contribs 7,731 bytes −4 The source is from the early 2000s, not the late 80s. No idea why this sentence said "Same year" but appears flatly wrong. undo Tag: Visual edit

26 October 2021

• curprev 16:3416:34, 26 October 2021 TheKanter talk contribs 7,735 bytes −281 Factually incorrect statement. See https://www.eetimes.com/tsmc-to-accelerate-immersion-litho-in-production/ TSMC did not use 193i in 90nm production and I don't think they even used it for 65nm. https://www.design-reuse.com/news/12662/tsmc-immersion-lithography-nearly-ready.html as more evidence. In 90nm they ran test wafers with 193i, but did not actually use it in production. undo Tag: Visual edit

29 January 2021

• curprev 22:1622:16, 29 January 2021 Monkbot talk contribs m 8,016 bytes +3 Task 18 (cosmetic): eval 3 templates: hyphenate params (3×); undo Tag: AWB

29 November 2020

• curprev 16:4616:46, 29 November 2020 KenShirriff talk contribs 8,013 bytes +107 Tag confusing sentence. undo

4 May 2020

• curprev 08:0608:06, 4 May 2020 Pancho507 talk contribs 7,906 bytes +112 Adding local short description: "Photolithography technique where there is a layer of water between a lens and a microchip", overriding Wikidata description "photolithography technique for manufacturing integrated circuits" (Shortdesc helper) undo

22 January 2020

• curprev 04:0904:09, 22 January 2020 InternetArchiveBot talk contribs 7,794 bytes +259 Rescuing 1 sources and tagging 0 as dead.) #IABot (v2.0 undo

22 September 2019

• curprev 14:4014:40, 22 September 2019 Monkbot talk contribs m 7,535 bytes −1 →top: Task 16: replaced (1×) / removed (0×) deprecated |dead-url= and |deadurl= with |url-status=; undo Tag: AWB

16 September 2019

• curprev 20:4020:40, 16 September 2019 Maestro2016 talk contribs 7,536 bytes +548 IBM undo
• curprev 20:3620:36, 16 September 2019 Maestro2016 talk contribs 6,988 bytes +53 No edit summary undo

30 June 2019

• curprev 17:1517:15, 30 June 2019 Maestro2016 talk contribs 6,935 bytes +279 No edit summary undo

13 April 2019

• curprev 03:2403:24, 13 April 2019 42.71.102.97 talk 6,656 bytes 0 No edit summary undo Tags: Mobile edit Mobile web edit

13 January 2019

• curprev 23:3223:32, 13 January 2019 128.68.63.190 talk 6,656 bytes +25 →Throughput undo

2 December 2018

• curprev 19:2519:25, 2 December 2018 Vycl1994 talk contribs 6,631 bytes +10 →top: https://www.ieee.org/about/awards/bios/brunetti-recipients.html#2009---burn-jeng-lin undo

31 July 2018

• curprev 07:0807:08, 31 July 2018 Me, Myself, and I are Here talk contribs 6,621 bytes −73 dash, cap, simplify headings undo

26 July 2018

• curprev 12:0112:01, 26 July 2018 114.47.23.150 talk 6,694 bytes +10 →Defects in immersion lithography undo
• curprev 11:5811:58, 26 July 2018 114.47.23.150 talk 6,684 bytes +17 →Defects in immersion lithography undo
• curprev 11:5611:56, 26 July 2018 114.47.23.150 talk 6,667 bytes −1 →Defects in immersion lithography undo
• curprev 11:5611:56, 26 July 2018 114.47.23.150 talk 6,668 bytes +280 →Defects in immersion lithography undo
• curprev 11:3411:34, 26 July 2018 114.47.23.150 talk 6,388 bytes −2 →Topcoats for immersion lithography undo

21 July 2018

• curprev 06:0606:06, 21 July 2018 Guiding light talk contribs 6,390 bytes +208 →Multiple Patterning undo
• curprev 06:0306:03, 21 July 2018 Guiding light talk contribs 6,182 bytes +23 →Multiple Patterning undo

18 July 2018

• curprev 14:1614:16, 18 July 2018 Guiding light talk contribs 6,159 bytes 0 →Throughput of immersion lithography undo
• curprev 14:1614:16, 18 July 2018 Guiding light talk contribs 6,159 bytes +27 →Multiple Patterning undo
• curprev 02:5102:51, 18 July 2018 Guiding light talk contribs 6,132 bytes 0 →Multiple Patterning undo