Fluorosilicate glass - Misplaced Pages

Fluorosilicate glass (FSG) is a glass material composed primarily of fluorine, silicon and oxygen. It has a number of uses in industry and manufacturing, especially in semiconductor fabrication where it forms an insulating dielectric. The related fluorosilicate glass-ceramics have good mechanical and chemical properties.

Semiconductor fabrication

FSG has a small relative dielectric constant (low-κ dielectric) and is used in between metal copper interconnect layers during silicon integrated circuit fabrication process. It is widely used by semiconductor fabrication plants on geometries under 0.25 microns (μ). FSG is effectively a fluorine-containing silicon dioxide (κ=3.5, while κ of undoped silicon dioxide is 3.9). FSG is used by IBM. Intel started using Cu metal layers and FSG on its 1.2 GHz Pentium processor at 130 nm complementary metal–oxide–semiconductor (CMOS). Taiwan Semiconductor Manufacturing Company (TSMC) combined FSG and copper in the Altera APEX.

Fluorosilicate glass-ceramics

Fluorosilicate glass-ceramics are crystalline or semi-crystalline solids formed by careful cooling of molten fluorosilicate glass. They have good mechanical properties.

Potassium fluororichterite based materials are composed from tiny interlocked rod-shaped amphibole crystals; they have good resistance to chemicals and can be used in microwave ovens. Richterite glass-ceramics are used for high-performance tableware.

Fluorosilicate glass-ceramics with sheet structure, derived from mica, are strong and machinable. They find a number of uses and can be used in high vacuum and as dielectrics and precision ceramic components. A number of mica and mica-fluoroapatite glass-ceramics were studied as biomaterials.

References

Committee, E.D.F.A.S.D.R. (2004). Microelectronics Failure Analysis: Desk Reference. ASM International. ISBN 9780871708045. Retrieved 2015-04-13.
Soltis, F.G. (2001). Fortress Rochester: The Inside Story of the IBM ISeries. News/400 Books. p. 54. ISBN 9781583040836. Retrieved 2015-04-13.
Martin, J.W. (2006). Concise Encyclopedia of the Structure of Materials. Elsevier Science. p. 203. ISBN 9780080524634. Retrieved 2015-04-13.

v t e Glass science topics
Basics	Glass Glass transition Supercooling
Formulation	AgInSbTe Bioglass Borophosphosilicate glass Borosilicate glass Ceramic glaze Chalcogenide glass Cobalt glass Cranberry glass Crown glass Flint glass Fluorosilicate glass Fused quartz GeSbTe Gold ruby glass Lead glass Milk glass Phosphosilicate glass Photochromic lens glass Silicate glass Soda–lime glass Sodium hexametaphosphate Soluble glass Tellurite glass Thoriated glass Ultra low expansion glass Uranium glass Vitreous enamel Wood's glass ZBLAN
Glass-ceramics	Bioactive glass CorningWare Glass-ceramic-to-metal seals Macor Zerodur
Preparation	Annealing Chemical vapor deposition Glass batch calculation Glass forming Glass melting Glass modeling Ion implantation Liquidus temperature sol–gel technique Viscosity Vitrification
Optics	Achromat Dispersion Gradient-index optics Hydrogen darkening Optical amplifier Optical fiber Optical lens design Photochromic lens Photosensitive glass Refraction Transparent materials
Surface modification	Anti-reflective coating Chemically strengthened glass Corrosion Dealkalization DNA microarray Hydrogen darkening Insulated glazing Porous glass Self-cleaning glass sol–gel technique Tempered glass
Diverse topics	Conservation and restoration of glass objects Glass-coated wire Safety glass Glass databases Glass electrode Glass fiber reinforced concrete Glass ionomer cement Glass microspheres Glass-reinforced plastic Glass cloth Glass-to-metal seal Porous glass Pre-preg Prince Rupert's drops Radioactive waste vitrification Windshield Glass fiber

This glass material related article is a stub. You can help Misplaced Pages by expanding it.

This article related to medical technology is a stub. You can help Misplaced Pages by expanding it.

Categories:

Semiconductor fabrication

Fluorosilicate glass-ceramics

See also

References