| Discipline | Microlithography, nanolithography, metrology |
|---|---|
| Language | English |
| Edited by | Harry Levinson |
| Publication details | |
| Former name(s) |
|
| History | 2002–present |
| Publisher | SPIE |
| Frequency | Quarterly |
| Impact factor | 2.3 (2022) |
| Standard abbreviations ISO 4 (alt) · Bluebook (alt) NLM (alt) · MathSciNet (alt  ) | |
| ISO 4 | J. Micro/Nanopatterning Mater. Metrol. |
| Indexing CODEN (alt · alt2) · JSTOR (alt) · LCCN (alt) MIAR · NLM (alt) · Scopus | |
| CODEN | JMMMIH |
| ISSN | 1932-5150 (print) 2708-8340 (web) |
| OCLC no. | 1249108189 |
| Links | |
Journal of Micro/Nanopatterning, Materials, and Metrology is a peer-reviewed scientific journal published quarterly by SPIE. It covers science, development, and practice of micro and nanofabrication processes and metrology. Established in 2002 under the name Journal of Microlithography, Microfabrication, and Microsystems, it was subsequently retitled to Journal of Micro/Nanolithography, MEMS, and MOEMS in 2007. The journal title was changed to its current name in 2021.
The editor-in-chief of the journal is Harry Levinson (HJL Lithography).
Abstracting and indexing
The journal is abstracted and indexed in:
- Current Contents/Electronics & Telecommunications Collection
- Current Contents/Engineering, Computing & Technology
- Current Contents/Physical, Chemical & Earth Sciences
- EBSCO databases
- Ei Compendex
- Inspec
- Science Citation Index Expanded
- Scopus
According to the Journal Citation Reports, the journal has a 2022 impact factor of 2.3.
References
- ^ "Journal of Micro/Nanopatterning, Materials, and Metrology". SPIE. Retrieved May 22, 2024.
- Journal of Micro/Nanopatterning, Materials, and Metrology (JMMMIH; 2708-8340) – via CASSI
- ^ "Web of Science Master Journal List". Intellectual Property & Science. Clarivate. Retrieved May 22, 2024.
- "Journal of Micro/Nanopatterning, Materials, and Metrology". MIAR: Information Matrix for the Analysis of Journals. University of Barcelona. Retrieved May 22, 2024.
- "Content/Database Overview - Compendex Source List". Engineering Village. Elsevier. Retrieved May 22, 2024.
- "Inspec list of journals" (PDF). Inspec. Institution of Engineering and Technology. Archived from the original (PDF) on May 5, 2022. Retrieved May 22, 2024.
- "Journal of Micro/Nanopatterning, Materials, and Metrology". Scopus Preview. Elsevier. Retrieved May 22, 2024.
- "Journal of Micro/Nanopatterning, Materials, and Metrology". 2022 Journal Citation Reports (Science ed.). Clarivate. 2023 – via Web of Science.