Names | |
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Preferred IUPAC name 1-Methoxypropan-2-yl acetate | |
Other names PGMEA; 1-methoxy-2-propanyl acetate; PM Acetate; Propylene glycol monomethyl ether acetate | |
Identifiers | |
CAS Number | |
3D model (JSmol) | |
ChemSpider | |
ECHA InfoCard | 100.003.277 |
PubChem CID | |
UNII | |
CompTox Dashboard (EPA) | |
InChI
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SMILES
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Properties | |
Chemical formula | C6H12O3 |
Molar mass | 132.159 g·mol |
Appearance | Colorless liquid |
Density | 0.962 g/cm |
Melting point | −67 °C (−89 °F; 206 K) |
Boiling point | 146 °C (295 °F; 419 K) |
Solubility in water | 19.8g /100mL H2O(25 °C |
log P | 0.26 |
Hazards | |
GHS labelling: | |
Hazard statements | H226, H402 |
NFPA 704 (fire diamond) | 1 2 0 |
Flash point | 43 °C (109 °F; 316 K) |
Autoignition temperature |
333 °C (631 °F; 606 K) |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C , 100 kPa). Infobox references |
Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA, by Shell Chemical under the name methyl proxitol acetate, and by Eastman under the name PM Acetate.
In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers. The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms, due to its evaporation into ambient air.
References
- "1-Methoxy-2-propyl acetate_msds". ChemSrc. Retrieved 28 September 2019.
- GOV, NOAA Office of Response and Restoration, US. "PROPYLENE GLYCOL METHYL ETHER ACETATE - CAMEO Chemicals - NOAA".
{{cite web}}
: CS1 maint: multiple names: authors list (link) - http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf
- "Archived copy" (PDF). Archived from the original (PDF) on 2014-08-08. Retrieved 2014-08-01.
{{cite web}}
: CS1 maint: archived copy as title (link) - "Shell Glycol Ethers and Acetates".
- "Eastman EastaPure PM Acetate" (PDF). Eastman Chemical Company. 23 September 2019. Retrieved 23 September 2019.
- "HMDS primer (hexamethyldisilazane), DEATS and PGMEA". Archived from the original on 2016-08-17. Retrieved 2016-07-29.
- "Archived copy" (PDF). Archived from the original (PDF) on 2016-10-03. Retrieved 2016-07-29.
{{cite web}}
: CS1 maint: archived copy as title (link)