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Semiconductor device fabrication
MOSFET scaling (process nodes)
020 μm – 1968 010 μm – 1971 006 μm – 1974 003 μm – 1977  1.5 μm – 1981 001 μm – 1984 800 nm – 1987 600 nm – 1990 350 nm – 1993 250 nm – 1996 180 nm – 1999 130 nm – 2001 090 nm – 2003 065 nm – 2005 045 nm – 2007 032 nm – 2009 028 nm – 2010 022 nm – 2012 014 nm – 2014 010 nm – 2016 007 nm – 2018 005 nm – 2020 003 nm – 2022
Future 002 nm ~ 2025
Half-nodes Density CMOS Device (multi-gate) Moore's law Transistor count Semiconductor Industry Nanoelectronics
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The "22 nm" node is the process step following 32 nm in CMOS MOSFET semiconductor device fabrication. The typical half-pitch (i.e., half the distance between identical features in an array) for a memory cell using the process is around 22 nm. It was first demonstrated by semiconductor companies for use in RAM in 2008. In 2010, Toshiba began shipping 24 nm flash memory chips, and Samsung Electronics began mass-producing 20 nm flash memory chips. The first consumer-level CPU deliveries using a 22 nm process started in April 2012 with the Intel Ivy Bridge processors.

Since at least 1997, "process nodes" have been named purely on a marketing basis, and have no relation to the dimensions on the integrated circuit; neither gate length, metal pitch or gate pitch on a "22nm" device is twenty-two nanometers.

The ITRS 2006 Front End Process Update indicates that equivalent physical oxide thickness will not scale below 0.5 nm (about twice the diameter of a silicon atom), which is the expected value at the 22 nm node. This is an indication that CMOS scaling in this area has reached a wall at this point, possibly disturbing Moore's law.

The 20-nanometre node is an intermediate half-node die shrink based on the 22-nanometre process.

TSMC began mass production of 20 nm nodes in 2014. The 22 nm process was superseded by commercial 14 nm FinFET technology in 2014.

Technology demos

On August 18, 2008, AMD, Freescale, IBM, STMicroelectronics, Toshiba, and the College of Nanoscale Science and Engineering (CNSE) announced that they jointly developed and manufactured a 22 nm SRAM cell, built on a traditional six-transistor design on a 300 mm wafer, which had a memory cell size of just 0.1 μm. The cell was printed using immersion lithography.

The 22 nm node may be the first time where the gate length is not necessarily smaller than the technology node designation. For example, a 25 nm gate length would be typical for the 22 nm node.

On September 22, 2009, during the Intel Developer Forum Fall 2009, Intel showed a 22 nm wafer and announced that chips with 22 nm technology would be available in the second half of 2011. SRAM cell size is said to be 0.092 μm, smallest reported to date.

On January 3, 2010, Intel and Micron Technology announced the first in a family of 25 nm NAND devices.

On May 2, 2011, Intel announced its first 22 nm microprocessor, codenamed Ivy Bridge, using a FinFET technology called 3-D tri-gate.

IBM's POWER8 processors are produced in a 22 nm SOI process.

Shipped devices

• Toshiba announced that it was shipping 24 nm flash memory NAND devices on August 31, 2010.
• In 2010, Samsung Electronics began mass production of 64 Gbit NAND flash memory chips using a 20 nm process.
• Also in 2010, Hynix introduced a 64 Gbit NAND flash memory chip using a 20 nm process.
• On April 23, 2012, Intel Core i7 and Intel Core i5 processors based on Intel's Ivy Bridge 22 nm technology for series 7 chipsets went on sale worldwide. Volume production of 22 nm processors began more than six months earlier, as confirmed by former Intel CEO Paul Otellini on October 19, 2011.
• On June 3, 2013, Intel started shipping Intel Core i7 and Intel Core i5 processors based on Intel's Haswell microarchitecture in 22 nm tri-gate FinFET technology for series 8 chipsets. Intel's 22nm process has a transistor density of 16.5 million transistors per square milimeter (MTr/mm2).

References

1. "No More Nanometers – EEJournal". July 23, 2020.
2. Shukla, Priyank. "A Brief History of Process Node Evolution". design-reuse.com. Retrieved July 9, 2019.
3. Hruska, Joel. "14nm, 7nm, 5nm: How low can CMOS go? It depends if you ask the engineers or the economists..." ExtremeTech.
4. "Exclusive: Is Intel Really Starting To Lose Its Process Lead? 7nm Node Slated For Release in 2022". wccftech.com. September 10, 2016.
5. "Life at 10nm. (Or is it 7nm?) And 3nm - Views on Advanced Silicon Platforms". eejournal.com. March 12, 2018.
6. "20nm Technology". TSMC. Retrieved June 30, 2019.
7. "TG Daily news report". Archived from the original on August 19, 2008. Retrieved August 18, 2008.
8. EETimes news report
9. Intel announces 22nm chips for 2011
10. Intel 22nm 3-D Tri-Gate Transistor Technology
11. IBM opens Power8 kimono (a little bit more)
12. Toshiba launches 24nm process NAND flash memory
13. "History". Samsung Electronics. Samsung. Retrieved June 19, 2019.
14. "History: 2010s". SK Hynix. Archived from the original on April 29, 2021. Retrieved July 8, 2019.
15. Intel launches Ivy Bridge...
16. Tom's Hardware: Intel to Sell Ivy Bridge Late in Q4 2011
17. "4th Generation Intel Core Processors Coming Soon". Archived from the original on February 9, 2015. Retrieved April 27, 2013.
18. "Intel's 10nm Cannon Lake and Core i3-8121U Deep Dive Review".

• International Technology Roadmap for Semiconductors lithography nodes